TaN thin film fabricated by the magnetron sputtering with medium vacuum

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[1] Hashizume, T.
[2] Saiki, A.
[3] Terayama, K.
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Hashizume, T. (hasizume@eng.u-toyama.ac.jp) | 1600年 / Australasian Ceramic Society, Singapore卷 / 49期
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