Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

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[1] Franta, D.
[2] Ohlídal, I.
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Franta, D. | 2000年 / John Wiley & Sons Ltd, Chichester, United Kingdom卷 / 30期
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10.1002/1096-9918(200008)30:13.0.CO;2-U
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