Precision measurement of nanobeam thickness using bending test

被引：0
|
作者：
Xu, Lin-Yan [1 ]
Li, Da-Chao [1 ]
Liu, Rui-Peng [2 ]
Fu, Xing [1 ]
Hu, Xiao-Tang [1 ]
Zhang, Wen-Dong [3 ]
机构：
[1] State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
[2] Department of Quality Standardization, Tianjin Navigation Instruments Research Institute, Tianjin 300131, China
[3] National Key Laboratory for Electronic Measurement Technology, North University of China, Taiyuan 030051, China
来源：
Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering | 2010年 / 8卷 / 01期
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页码：7 / 11
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