Optical properties of nitride-rich SiNx and its use in CMOS-compatible near-UV Bragg filter fabrication

被引：0
|
作者：
Wolffenbuttel, Reinoud F. [1 ]
Winship, Declan [2 ]
Qin, Yutao [2 ]
Gianchandani, Yogesh [2 ]
Bilby, David [3 ]
Visser, Jaco H. [3 ]
机构：
[1] Laboratory for Electronic Instrumentation, Department of Microelectronics, Delft University of Technology, Delft,2628 CD, Netherlands
[2] Center for Wireless Integrated MicroSensing and Systems (WIMS2) and the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor,MI,48109, United States
[3] Research and Advanced Engineering, Ford Motor Company, Dearborn,MI,48121, United States
来源：
Optical Materials: X | 2024年 / 24卷
关键词：
All Open Access; Gold;
D O I：
10.1016/j.omx.2024.100348
中图分类号：
学科分类号：
摘要：
45
引用
收藏
相关论文
共 10 条
  • [1] Bragg Soliton Compression and Fission on CMOS-Compatible Ultra-Silicon-Rich Nitride
    Sahin, Ezgi
    Blanco-Redondo, Andrea
    Xing, Peng
    Ng, Doris K. T.
    Png, Ching E.
    Tan, Dawn T. H.
    Eggleton, Benjamin J.
    LASER & PHOTONICS REVIEWS, 2019, 13 (08)
  • [2] Fabrication of CMOS-compatible optical filter arrays using gray-scale lithography
    Xiao, Jing
    Song, Fuchuan
    Han, Kijeong
    Seo, Sang-Woo
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2012, 22 (02)
  • [3] Nonlinear optical signal processing in CMOS-compatible ultra-silicon-rich nitride devices
    Tan, D. T. H.
    Ng, D. K. T.
    Ooi, K. J. A.
    Sahin, E.
    Choi, J. W.
    Xing, P.
    Chen, G. F. R.
    Sohn, B. U.
    Gao, H.
    2019 24TH OPTOELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC) AND 2019 INTERNATIONAL CONFERENCE ON PHOTONICS IN SWITCHING AND COMPUTING (PSC), 2019,
  • [4] Enhanced optical nonlinearities in CMOS-compatible ultra-silicon-rich nitride photonic crystal waveguides
    Sahin, E.
    Ooi, K. J. A.
    Chen, G. F. R.
    Ng, D. K. T.
    Png, C. E.
    Tan, D. T. H.
    APPLIED PHYSICS LETTERS, 2017, 111 (12)
  • [5] Soliton-effect optical pulse compression in CMOS-compatible ultra-silicon-rich nitride waveguides
    Choi, Ju Won
    Sohn, Byoung-Uk
    Chen, George F. R.
    Ng, Doris K. T.
    Tan, Dawn T. H.
    APL PHOTONICS, 2019, 4 (11)
  • [6] Efficient Bragg grating fabrication in a fibre through its polymer jacket using near-UV light
    Starodubov, DS
    Grubsky, V
    Feinberg, J
    ELECTRONICS LETTERS, 1997, 33 (15) : 1331 - 1333
  • [7] Design and fabrication of ripple-free CMOS-compatible stacked membranes for airgap optical filters for UV-visible spectrum
    Ghaderi, Mohammadamir
    de Graaf, Ger
    Wolffenbuttel, Reinoud F.
    MICRO-OPTICS 2016, 2016, 9888
  • [8] Bragg grating fabrication in germanosilicate fibers by use of near-UV light: A new pathway for refractive-index changes
    Starodubov, DS
    Grubsky, V
    Feinberg, J
    Kobrin, B
    Juma, S
    OPTICS LETTERS, 1997, 22 (14) : 1086 - 1088
  • [9] Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties
    Reiter, Sebastian
    Han, Weijia
    Mai, Christian
    Spirito, Davide
    Jose, Josmy
    Zoellner, Marvin
    Fursenko, Oksana
    Schubert, Markus Andreas
    Stemmler, Ivo
    Wenger, Christian
    Fischer, Inga Anita
    PLASMONICS, 2023, 18 (03) : 831 - 843
  • [10] Titanium Nitride Plasmonic Nanohole Arrays for CMOS-Compatible Integrated Refractive Index Sensing: Influence of Layer Thickness on Optical Properties
    Sebastian Reiter
    Weijia Han
    Christian Mai
    Davide Spirito
    Josmy Jose
    Marvin Zöllner
    Oksana Fursenko
    Markus Andreas Schubert
    Ivo Stemmler
    Christian Wenger
    Inga Anita Fischer
    Plasmonics, 2023, 18 : 831 - 843
1