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- [3] Effective Removal of CF4 by Combining Nonthermal Plasma with γ-Al2O3 Plasma Chemistry and Plasma Processing, 2019, 39 : 877 - 896
- [6] CF4 plasma-based atomic layer etching of Al2O3 and surface smoothing effect JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2023, 41 (01):