Sputtering highly c-axis-oriented AlN films on Y-128° LiNbO3

被引：0
|
作者：
Wu, Long [1 ]
Chen, Ping-Chen [1 ]
Wu, Sean [1 ]
Song, Hong-Tie [1 ]
Chure, Ming-Cherng [2 ]
机构：
[1] Department of Electrical Engineering, National Cheng Kung University, 1 University Rd., Tainan, Taiwan
[2] Department of Electrical Engineering, Far East College, Tainan, Taiwan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 2000年 / 39卷 / 6 A期
关键词：
D O I：
10.1143/jjap.39.l545
中图分类号：
学科分类号：
摘要：
10
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