共 29 条
- [1] Shieh H., Lin F., Huang P., Adaptive displacement control with hysteresis modeling for piezoactuated positioning mechanism, IEEE Transactions on Industrial Electronics, 53, 3, pp. 905-914, (2006)
- [2] Chen X., Su C., Li Z., Design of implementable adaptive control for micro/nano positioning system driven by piezoelectric actuator, IEEE Transactions on Industrial Electronics, 63, 10, pp. 6471-6481, (2016)
- [3] Wang Z., Witthauer A., Zou Q., Control of a magnetostrictive-actuator-based micromachining system for optimal high-speed microforming process, IEEE/ASME Transactions on Mechatronics, 20, 3, pp. 1046-1055, (2015)
- [4] Yan G., Liu Y., Feng Z., A dual-stage piezoelectric stack for highspeed and long-range actuation, IEEE/ASME Transactions on Mechatronics, 20, 5, pp. 2637-2641, (2015)
- [5] Mynderse J., Chiu G., Two-degree-of-freedom hysteresis compensation for a dynamic mirror actuator, IEEE/ASME Transactions on Mechatronics, 21, 1, pp. 29-37, (2016)
- [6] Abbaspour R., Brown D., Bakir M., Fabrication and electrical characterization of sub-micron diameter through-silicon via for heterogeneous three-dimensional integrated circuits, Journal of Micromechanics & Microengineering, 27, 2, (2017)
- [7] Tang H., Gao J., Chen X., Development and repetitive-compensated PID control of a nanopositioning stage with large-stroke and decoupling property, IEEE Transactions on Industrial Electronics, 65, 5, pp. 3995-4005, (2018)
- [8] Ge P., Jouaneh M., Tracking control of a piezoceramic actuator, IEEE Transactions on Control Systems Technology, 4, 3, pp. 209-216, (1996)
- [9] Xu Q., Continuous integral terminal third-order sliding mode motion control for piezoelectric nanopositioning system, IEEE/ASME Transactions on Mechatronics, 22, 4, pp. 1828-1838, (2017)
- [10] Mao X., Wang Y., Liu X., A Hybrid feedforward-feedback hysteresis compensator in piezoelectric actuators based on least squares support vector machine, IEEE Transactions on Industrial Electronics, 65, 7, pp. 5704-5711, (2018)