Vibration suppression of magnetic levitation molecular pump rotor

被引：0
|
作者：
Yao R. [1 ]
Zhou J. [1 ]
Ding S. [1 ]
Zhang Y. [1 ]
Xu Y. [1 ]
机构：
[1] College of Mechanical & Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing
来源：
Zhendong yu Chongji/Journal of Vibration and Shock | 2024年 / 43卷 / 01期
关键词：
cross feedback control; magnetic levitation molecular pump; notch filter; vibration suppression;
D O I：
10.13465/j.cnki.jvs.2024.01.014
中图分类号：
学科分类号：
摘要：
A magnetic levitation molecular pump has characteristics of high operating rotating speed and large rotor polar moment of inertia. Here, aiming at bending modal vibrations and whirl modal vibrations occurring in acceleration process of magnetic levitation molecular pump rotor, a control method for magnetic levitation rotor with a large moment of inertia based on filtered cross feedback and notch filter was proposed. The dynamic model of a magnetic levitation bearing-large moment of inertia rigid rotor system was established to solve rotor whirl modal frequencies. With this model, the suppression effect of filtered cross feedback controller on whirl modal vibrations was analyzed, and a notch filter was designed to suppress rotor bending modal vibrations under different rotating speeds. The experimental results showed that when magnetic levitation molecular pump steadily increases its rotating speed to 18 000 r/min, its rotor vibration displacement is 35 (xm, its rotor bending modal vibration and whirl modal vibration are effectively suppressed. © 2024 Chinese Vibration Engineering Society. All rights reserved.
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页码：116 / 122
页数：6
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