Structural and surface chemical states of (Pb0.5Sr0.5)TiO3 thin films by sol-gel process

被引：0
|
作者：
Li, Qun [1 ]
Xiong, Hui-Fang [1 ]
Tang, Xin-Gui [1 ]
机构：
[1] School of Physics and Optoelectric Engineering, Guangdong University of Technology, Guangzhou Higher Education Mega Center, Guangzhou 510006, China
来源：
Gongneng Cailiao/Journal of Functional Materials | 2009年 / 40卷 / 12期
关键词：
Thin films - Lead oxide - Sol-gel process - Perovskite - Strontium titanates - X ray diffraction;
D O I：
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学科分类号：
摘要：
Lead strontium titanate (Pb0.5Sr0.5)TiO3 (abbreviated as PST) thin films were deposited on Pt/Ti/SiO2/Si(100) substrates by using a sol-gel method with spin-coating processing. The crystalline films were studied by means of X-ray diffraction (XRD) and atom force microscopy (AFM). The results show that the film was annealed at 650°C for 30min with perovskite cubic phase, and the lattice parameter a=0.3919nm. The chemical states and chemical composition of the films were determined by X-ray photoelectron spectroscopy (XPS) near the surface. The results show that the extra lead oxides exist in film surfaces. The atomic ratio Pb:Sr:Ti:O in the near-surface region is 0.52:0.50:1.00:3.02, which is closer to the stoichiometry of (Pb0.5Sr b0.5)TiO3.
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页码：1973 / 1975
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