Preparation of nano SiO2/CeO2 composite particles and their applications to CMP on sapphire substrates

被引：8
|
作者：
Bai, Lin-Shan [1 ]
Xiong, Wei [1 ]
Chu, Xiang-Feng [1 ]
Dong, Yong-Ping [1 ]
Zhang, Wang-Bing [1 ]
机构：
[1] School of Chemistry and Chemical Engineering, Anhui University of Technology, Maanshan 243002, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2014年 / 22卷 / 05期
关键词：
D O I：
10.3788/OPE.20142205.1289
中图分类号：
学科分类号：
摘要：
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页码：1289 / 1295
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