Experimental Research and Optimization of Process Parameters in the Electrical Discharge Machining of Monocrystalline Silicon

被引：0
|
作者：
Xin B. [1 ]
Li S.-J. [1 ]
Li Y.-X. [2 ]
机构：
[1] School of Mechanical and Instrumental Engineering, Xi'an University of Technology, Xi'an, 710048, Shaanxi
[2] Xi'an Modern Control Technology Research Institute, Xi'an, 710065, Shaanxi
来源：
Li, Shu-Juan (shujuanli@xaut.edu.cn) | 1854年 / China Ordnance Industry Corporation卷 / 38期
关键词：
Electrical discharge machining; Electrode loss; Genetic algorithm; Manufacturing technology and equipment; Material removal rate; P-type monocrystalline silicon; Surface roughness;
D O I：
10.3969/j.issn.1000-1093.2017.09.024
中图分类号：
学科分类号：
摘要：
In order to solve the problem that the material removal rate, the surface roughness and the electrode loss cannot be simultaneously taken into account in electrical discharge machining, the influences of peak current, pulse width and pulse interval on the material removal rate, surface roughness and electrode loss in the electrical discharge machining of P-type monocrystalline silicon are analyzed through central composite design experiments. The response surface method is used to establish a second-order relational model of material removal rate, surface roughness and electrode loss. The results of variance analysis indicate that the proposed model has good fitting degree and adaptability. A process parameter optimization model is established by analyzing the constraints of the actual processing conditions on the process parameters to improve the material removal rate in the electrical discharge machining of monocrystalline silicon, and reduce both the surface roughness and the electrode loss, and the NSGA- II-based algorithm is designed to solve the optimization problems. The average relative errors of validation results of material removal rate, surface roughness and electrode loss under the condition of the optimal solution are 4.9%, 5.2% and 5.7%, respectively, compared with the theoretical optimal values. The verification tests show that the proposed algorithm can achieve the process parameters optimization of silicon materials in the electrical discharge machining. © 2017, Editorial Board of Acta Armamentarii. All right reserved.
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页码：1854 / 1861
页数：7
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