Design of image sampling system used in SEM

被引:0
|
作者
机构
来源
| 2005年 / Weixi Jiagong Jishu, Changsha, China卷
关键词
D O I
暂无
中图分类号
学科分类号
摘要
A new image sampling system with FPGA is designed to improve the data sampling part of the old model SEM (scanning electron microscope). The design performs the logical control of the system by using FPGA. It used ADS1606 of TI Corp. as the analog-digital converter chip. The instrument amplifier, driving circuit and reference sources circuit are suitably designed according to the imaging signal. The control process of FPGA and some program edited with Verilog HDL are presented. Also, some considerations of the circuit designing is emphasized.
引用
收藏
相关论文
共 50 条
  • [1] Design of image scanning system based on SEM
    Ren, Sheng-Xian
    Fang, Guang-Rong
    Weixi Jiagong Jishu/Microfabrication Technology, 2007, (02): : 1 - 4
  • [2] SAMPLING WAVEFORMS FOR AN SEM USED IN THE VOLTAGE CONTRAST SAMPLING MODE.
    Anon
    IBM technical disclosure bulletin, 1985, 28 (04): : 1528 - 1529
  • [3] Image Data Storage Measurement System Used Platform Design
    Ma Youchun
    Li Jinming
    Yang Yuanhong
    ISTM/2009: 8TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-6, 2009, : 750 - 753
  • [5] DEVELOPMENT OF IMAGE-PROCESSING SYSTEM FOR SEM
    YOSHIHARA, T
    YAMADA, M
    KOBAYASHI, T
    OVERTON, P
    EUREM 88, VOLS 1-3: TUTORIALS, INSTRUMENTATION AND TECHNIQUES / PHYSICS AND MATERIALS / BIOLOGY, 1988, 93 : 149 - 150
  • [6] DEVELOPMENT OF IMAGE-PROCESSING SYSTEM FOR SEM
    YOSHIHARA, T
    YAMADA, M
    KOBAYASHI, T
    OVERTON, P
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1988, (93): : 149 - 150
  • [7] DIGITAL IMAGE PROCESSING SYSTEM FOR SEM & EPMA
    Hu Wengou Wu Yongchiang Lin Lizhong and Chen ErgangPhysics Department Yunnan University Kunming China
    电子显微学报, 1991, (02) : 221 - 221
  • [8] Autofocusing Image System of CD-SEM
    Liu, Wei
    Shen, Jin
    Tan, Boxue
    PROCEEDINGS OF THE 2009 2ND INTERNATIONAL CONGRESS ON IMAGE AND SIGNAL PROCESSING, VOLS 1-9, 2009, : 3527 - 3529
  • [9] Design of a real-time image sampling system based on PCI and DSP
    Hou Shuping
    ISTM/2007: 7TH INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, VOLS 1-7, CONFERENCE PROCEEDINGS, 2007, : 1544 - 1547
  • [10] Rethinking sampling topologies for image quality estimation in Computational Imaging system design
    Berkner, Kathrin
    2010 CONFERENCE RECORD OF THE FORTY FOURTH ASILOMAR CONFERENCE ON SIGNALS, SYSTEMS AND COMPUTERS (ASILOMAR), 2010, : 851 - 855