Semiconductor science and information devices is one of the most important fields of science and technology, which is becoming increasingly important in the international competition environment. The national natural science foundation of China(NSFC) supports basic and applied basic research in semiconductor science and information devices, gradually forming the funding content consisting of free exploration research projects, guidance-guided research projects, talents projects, and national major scientific instrument development projects. We analyze the application and funding status of various types of projects under the F04 code of semiconductor science and information devices during the 13th to 14th Five-Year Plan period (2016-2021). Through the hot word cloud analysis of funded project topics over these years, the research directions and hot topics of the semiconductor field are shown. Based on the outstanding research achievements in semiconductor science and information devices from the 13th to 14th Five-Year Plan, the effects of the funding are demonstrated. This article is expected to show the characteristics of the funding of the Division of Information Science to semiconductor science and information devices in recent years, and to provide reference for researchers in domestic research institutes, enterprises and institutions to understand the research hot spots, future development direction and path in this field. © 2022 Chinese Institute of Electronics. All rights reserved.