Three-dimensional quantitative surface topography measurement using modulated-current based scanning ion conductance microscopy

被引：0
|
作者：
Guo R. [1 ]
Zhuang J. [1 ]
Yu D. [1 ]
机构：
[1] School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an
来源：
Zhuang, Jian | 1600年 / Xi'an Jiaotong University卷 / 50期
关键词：
Modulated current; Scanning ion conductance microscopy; Surface topography measurement; Three-dimensional quantitative measurement;
D O I：
10.7652/xjtuxb201607013
中图分类号：
学科分类号：
摘要：
A surface topography measurement method using modulated-current based scanning ion conductance microscopy (SICM) was proposed to perform surface topography measurement of materials in a three-dimensional, quantitative and nondestructive way simultaneously, which is unable for existing measurement methods. In order to improve the imaging quality of the existing SICM system, a modulated-current scanning mode was presented. In this mode, two pieces of piezoelectric ceramics were utilized in the structural design of the scanning head and the amplitude of the modulated ion current was used as the feedback signal. This design not only ensures the imaging performance of the probe for badly rough and uneven surfaces, but also improves the imaging quality. The imaging experiments on the micro-lens array surface indicated that the modulated-current scanning mode can reduce 43% of the spiny noise and improve the imaging quality compared with the conventional hopping scanning mode. Moreover, the quantitative comparison of imaging results with laser scanning confocal microscopy proves that the modulated-current based SICM can acquire more accurate three-dimensional quantitative measurement results, and the imaging accuracy can be further improved by using smaller probe and scanning steps. © 2016, Editorial Office of Journal of Xi'an Jiaotong University. All right reserved.
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页码：83 / 88and139
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