The optoelectronic properties of SiC films deposited by RF magnetron sputtering

被引：0
|
作者：
School of Physics Science and Technology, Central South University, Changsha 410083, China [1 ]
机构：
来源：
Gongneng Cailiao | 2007年 / 2卷 / 190-192期
关键词：
15;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：190 / 192
相关论文
共 50 条
  • [1] Microstructural and optoelectronic properties of polycrystalline InP films deposited by RF magnetron sputtering
    Chandra, G. Hema
    Perez de la Cruz, J.
    JOURNAL OF CRYSTAL GROWTH, 2012, 354 (01) : 67 - 75
  • [2] Structure and electronic properties of SiC thin-films deposited by RF magnetron sputtering
    Zhou Ji-cheng
    Zheng Xu-qiang
    TRANSACTIONS OF NONFERROUS METALS SOCIETY OF CHINA, 2007, 17 (02) : 373 - 377
  • [3] Structure and electronic properties of SiC thin-films deposited by RF magnetron sputtering
    周继承
    郑旭强
    TransactionsofNonferrousMetalsSocietyofChina, 2007, (02) : 373 - 377
  • [4] Nitrogen doping of SiC thin films deposited by RF magnetron sputtering
    Fraga, Mariana Amorim
    Massi, Marcos
    Oliveira, Ivo C.
    Maciel, Homero S.
    dos Santos Filho, Sebastiao G.
    Mansano, Ronaldo D.
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2008, 19 (8-9) : 835 - 840
  • [5] Nitrogen doping of SiC thin films deposited by RF magnetron sputtering
    Mariana Amorim Fraga
    Marcos Massi
    Ivo C. Oliveira
    Homero S. Maciel
    Sebastião G. dos Santos Filho
    Ronaldo D. Mansano
    Journal of Materials Science: Materials in Electronics, 2008, 19 : 835 - 840
  • [6] SiC coatings deposited by RF magnetron sputtering
    Tang, HD
    Tan, SH
    Huang, ZR
    HIGH-PERFORMANCE CERAMICS III, PTS 1 AND 2, 2005, 280-283 : 1309 - 1312
  • [7] Electrochromic Properties of LixNiyO Films Deposited by RF Magnetron Sputtering
    Kubo, Takaya
    Nishikitani, Yoshinori
    Sawai, Yuko
    Iwanaga, Hirosuke
    Sato, Yasushi
    Shigesato, Yuzo
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2009, 156 (08) : H629 - H633
  • [8] ZnO films deposited by RF magnetron sputtering
    Li, J
    Wu, ST
    Kang, JY
    SMIC-XIII: 2004 13th International Conference on Semiconducting & Insulating Materials, 2004, : 77 - 80
  • [9] Effect of Deposition Temperature on Microstructure Properties of SiC Thin Films Deposited using RF Magnetron Sputtering
    Mala, S.
    Ashwini, K. B.
    Latha, H. K. E.
    Udayakumar, A.
    INTERNATIONAL CONFERENCE ON TRENDS IN MATERIAL SCIENCE AND INVENTIVE MATERIALS: ICTMIM 2019, 2019, 2105
  • [10] Preparation and optoelectronic properties of a-IGZO thin films deposited by RF magnetron sputtering at different working pressures
    Ma, Rui-Xin
    Xiao, Yu-Qin
    Li, Shi-Na
    Wang, Yuan-Yuan
    Li, Dong-Ran
    He, Liang-Wei
    RARE METALS, 2018, 37 (07) : 599 - 603
12345