An inchworm-type multi-DOF stage

被引：0
|
作者：
机构：
[1] Torii, Akihiro
[2] Yamada, Tomohiro
[3] Kamiya, Ryosuke
[4] Ueda, Akiteru
[5] Doki, Kae
来源：
| 2013年 / Institute of Electrical Engineers of Japan卷 / 133期
关键词：
701.1 Electricity: Basic Concepts and Phenomena - 704.1 Electric Components - 732 Control Devices - 732.1 Control Equipment - 753.2 Ultrasonic Devices - 931.1 Mechanics;
D O I：
10.1541/ieejeiss.133.849
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摘要：
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