Phase, mechanical property and corrosion resistance evaluation of W-Nb-Ta-Ti and W-Nb-Ta-Ti-N medium entropy alloy thin films

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作者
Lou, Bih-Show [1 ,2 ]
Wang, Chaur-Jeng [3 ]
Chen, Yen-Yu [4 ]
Hung, Sheng-Bo [3 ]
Lin, Yu-Chen [5 ]
Lee, Jyh-Wei [5 ,6 ,7 ,8 ]
机构
[1] Chemistry Division, Center of General Education, Chang Gung University, Taoyuan, Taiwan
[2] Department of Orthopaedic Surgery, New Taipei Municipal TuCheng Hospital, Chang Gung Memorial Hospital, Taiwan
[3] Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan
[4] Department of Chemical and Materials Engineering, Chinese Culture University, Taipei, Taiwan
[5] Department of Materials Engineering, Ming Chi University of Technology, New Taipei City, Taiwan
[6] Center for Plasma and Thin Film Technologies, Ming Chi University of Technology, New Taipei City, Taiwan
[7] Department of Mechanical Engineering, Chang Gung University, Taoyuan, Taiwan
[8] High Entropy Materials Center, National Tsing Hua University, Hsinchu, Taiwan
关键词
High strength alloys - Microstructure - Crystal structure - Entropy - Corrosion resistant alloys - Thin films - Wear resistance - Heat resistance - Friction - High-entropy alloys - Sodium chloride - Tantalum alloys - Deposition - Hardness;
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摘要
Multicomponent alloy thin films including high entropy alloy (HEA) and medium entropy alloy (MEA) thin films have drawn lots of attention from researchers and industries because of their outstanding properties, such as high hardness, good wear and corrosion resistance. Among several kinds of multicomponent alloy systems, the refractory HEA and MEA are characterized by their high temperature strength and stable thermal properties. In this work, the W-Nb-Ta-Ti and W-Nb-Ta-Ti-N refractory MEA thin films were fabricated by a magnetron co-sputtering system. The structure of W-Nb-Ta-Ti-N coatings changed from BCC to B1 FCC nitride phase when the nitrogen concentration reached 42.6 at.%. The microstructure of BCC structured W-Nb-Ta-Ti-N thin films changed from a coarse columnar to a dense feature as the nitrogen content increased from 0 to 16.2 at.%. A maximum hardness of 24.4 GPa was obtained for the BCC structured W34.3Nb21.7Ta26.4Ti1.4N16.2 thin film. The best adhesion property and the lowest coefficient of friction were found for the FCC W31.1Nb9.6Ta13.1Ti3.6N42.6 nitride thin film. The corrosion resistance of 304SS substrate in 5 wt% NaCl aqueous solution was greatly enhanced by the deposition of the W-Nb-Ta-Ti and W-Nb-Ta-Ti-N refractory MEA thin films. The best corrosion resistance can be seen for the nitrogen-free W37.9Nb25.8Ta28.8Ti7.5 thin film due to its dense microstructure, highest Ta and Nb contents, high configurational entropy and sluggish diffusion effects. © 2022 Elsevier B.V.
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