Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

被引：0
|
作者：
Nikolajeff, Fredrik [1 ]
Löfving, Björn [2 ]
Johansson, Mathias [2 ]
Bengtsson, Jörgen [2 ]
Hård, Sverker [2 ]
Heine, Claus [3 ]
机构：
[1] Angstrom Laboratory, Uppsala University, P.O. Box 534, SE-751 21 Uppsala, Sweden
[2] Photonics Laboratory, Department of Microelectronics, Chalmers University of Technology, SE-412 96 Göteborg, Sweden
[3] Balzers Thin Films, P.O. Box 1000, FL-9496 Balzers, Liechtenstein
来源：
Applied Optics | 2000年 / 39卷 / 26期
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学科分类号：
摘要：
Diffractive optics
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页码：4842 / 4846
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