Oscillatory behavior of electrostatically-actuated nanoplates

With the assistance of Nano-technology, many devices have been proposed which are capable of analyzing infinitesimal particles accurately. Objective: Nano-plates are the essential parts in Bio-Nano Electro Mechanical Systems (Bio-NEMS), such as Bio-sensors and Lap-on-Chips, and many systems are working based on oscillations of the Nano-plates. Methods: In this paper, Third-order Shear Deformation Nanoplates actuated by an electrostatic force is modeled with the nonlocal linear elasticity theory. Because of the high sensitivity of these nano-plates, a general model to study different complexities of these nanosystems is considered. In this modeling, the nano-plate is modeled with Finite Element Method (FEM) to solve mathematical equations accurately. The finite element formulation of TSDT plate has is presented. Results: The results are compared with Generalized Differential Quadrature Method (GDQM). The difference between TSDT and other simpler plate theories is studied. Furthermore, the influence of different parameters, such as electrostatic voltage, length scale and aspect of length to thickness of the plate, are assessed. Conclusions: In this paper, we found that calculated pull-in voltage based on TSDT is less than previous plate theories; therefore, to analyze the vibration behavior of thick plates in a Bio-MEMS device, TSDT theory should be used to present accurate information. In this article, various patents have been discussed. © 2018 Bentham Science Publishers.