Linearity calibration method of the high-precision displacement sensor

被引：0
|
作者：
Zhang, Defu [1 ]
Ge, Chuan [1 ]
Li, Xianling [1 ]
Ni, Mingyang [1 ]
Guo, Kang [1 ]
Li, Pengzhi [1 ]
机构：
[1] State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun,130033, China
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2015年 / 36卷 / 05期
关键词：
D O I：
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学科分类号：
摘要：
15
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页码：982 / 988
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