A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms

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20144100085463
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[1] Beigelbeck, Roman
[2] Schneider, Michael
[3] Schalko, Johannes
[4] Bittner, Achim
[5] Schmid, Ulrich
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Beigelbeck, Roman | 1600年 / American Institute of Physics Inc.卷 / 116期
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  • [1] A two-step load-deflection procedure applicable to extract the Young's modulus and the residual tensile stress of circularly shaped thin-film diaphragms
    Beigelbeck, Roman
    Schneider, Michael
    Schalko, Johannes
    Bittner, Achim
    Schmid, Ulrich
    JOURNAL OF APPLIED PHYSICS, 2014, 116 (11)
  • [2] Improved Load-Deflection Method for the Extraction of Elastomechanical Properties of Circularly-Shaped Thin-Film Diaphragms
    Schalko, Johannes
    Beigelbeck, Roman
    Stifter, Michael
    Schneider, Michael
    Bittner, Achim
    Schmid, Ulrich
    SMART SENSORS, ACTUATORS, AND MEMS V, 2011, 8066
  • [3] Young's modulus and residual stress of polycrystalline 3C-SiC films grown by LPCVD and measured by the load-deflection technique
    Fu, XA
    Dunning, J
    Zorman, CA
    Mehregany, M
    SILICON CARBIDE AND RELATED MATERIALS 2003, PRTS 1 AND 2, 2004, 457-460 : 1519 - 1522
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