Effect of nitrogen flow rate on structure and properties of MoNxcoatings deposited by facing target sputtering

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[1] Wang, Tao
[2] Zhang, Guojun
[3] Ren, Shuai
[4] Jiang, Bailing
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Wang, Tao | 1600年 / Elsevier Ltd卷 / 701期
关键词：
Reactive sputtering - Nitrogen - Tribology - High resolution transmission electron microscopy - Coatings - Crystal structure - Nitrides - X ray diffraction - Molybdenum compounds - Phase structure - Scanning electron microscopy;
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