Measurement of Surface Acoustic Wave Velocity Curves of Silicon Crystal by Ultrasonic Method

被引：0
|
作者：
Song G. [1 ]
Hong G. [1 ]
Lu D. [1 ]
Lü Y. [1 ]
He C. [1 ]
Wu B. [1 ]
机构：
[1] College of Mechanical Engineering and Applied Electronic Technology, Beijing University of Technology, Beijing
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2018年 / 54卷 / 06期
关键词：
Acoustic elasticity theory; Acoustic microscopy; Elastic constants; Silicon crystal; Surface acoustic waves;
D O I：
10.3901/JME.2018.06.110
中图分类号：
学科分类号：
摘要：
As the crystal materials are applied widely in the fields of aerospace, transportation, electrical and electronic engineering, energy and environmental protection, the new requirements for the researches of their special properties and testing work put forward. Based on the constitutive relationship between the propagation characteristic of acoustic wave in materials and the surface wave velocity, an acoustic elasticity theoretical model of the surface acoustic waves (SAW) velocities of silicon crystal contacting with its elastic constants is established. The theoretical SAW velocities distribution curves of different crystallographic planes versus azimuthal angles are calculated by using the transformation matrix. Experimental measurements of SAW velocities along different azimuthal angles of three crystallographic planes by using the line focusing acoustic transducer, the high-precision defocusing measurement system and V (f, z) analysis, and the experimental curves of SAW velocities are consistent with the theoretical values. It proves that acoustic microscopy (AM) technology is of highly accuracy and reliability for the SAW velocities measurements of anisotropic materials. Meanwhile, the corresponding consistency between the crystal structure and SAW velocities of silicon crystal is studied further, which establishes the theoretical basis for the property detections and evaluations of anisotropic materials including silicon crystal. © 2018 Journal of Mechanical Engineering.
引用
收藏
页码：110 / 117
页数：7
相关论文
共 18 条
  • [1] Tang J., A review of aerospace materials, Spacecraft Environment Engineering, 30, 2, pp. 115-121, (2013)
  • [2] Qian Y., Zhou G., Cai D., Et al., Investigation of strength criterion for biaxial fiber-reinforced composite laminated plates, Journal of Nanjing University of Aeronautics & Astronautics, 45, 2, pp. 179-185, (2013)
  • [3] Wang X., Li C., An investigation of testing methods on the biaxial mechanical behaviors of anisotropic materials, Test Technology and Testing Machine, 46, 4, pp. 1-7, (2006)
  • [4] Wang H., Xu B., Ma S., Et al., Hardness and modulus of elasticity of brush plated nickle coating by nanoindentation testing, Chinese Journal of Mechanical Engineering, 41, 4, pp. 128-131, (2005)
  • [5] Chen Z., Su W., Wan M., FEM simulation and experiment verification of the monocrystal silicon nanoindentation process, Micronanoelectronic Technology, 46, 2, pp. 104-107, (2009)
  • [6] Li D., Yang D., Que D., Progress in study of crystal silicon mechanical properties, Journal of Materials Science and Engineering, 18, 3, pp. 100-104, (2000)
  • [7] Li D., Liang Y., Bai Q., Nano-indentation experiments on anisotropic mechanical properties of single crystal silicon, Aviation Precision Manufacturing Technology, 44, 2, pp. 9-12, (2008)
  • [8] Zhang T., Yang Y., Zhao Y., Et al., Measurement of mechanical properties of MEMS materials, Advances In Mechanics, 32, 4, pp. 545-562, (2002)
  • [9] Chen Q., Herrmann K., Menelao F., Comparative study about the determination of the Young's modulus of thin layers with the instrumented indentation test and the laser-acoustic measuring method, China Measurement & Test, 33, 1, pp. 77-81, (2007)
  • [10] Lu M., Yang Y., Chen Y., Et al., Determination of elastic constants in composite insulator from ultrasonic method, Journal of Materials Engineering, 11, pp. 46-49, (2005)
12