A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

被引：0

作者：

Su, Yongquan ^{[1
,2
,3
]}

Liu, Yichen ^{[2
,3
]}

Wang, Yang ^{[2
,4
]}

Sun, Qianying ^{[3
]}

Qiao, Qifeng ^{[3
]}

Weng, Zhichao ^{[1
,2
,3
]}

Wang, Lihao ^{[2
,3
,5
]}

Wu, Zhenyu ^{[1
,2
,3
,4
]}

机构：

[1] Shanghai Univ, Sch Microelect, Shanghai 200444, Peoples R China

[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China

[3] Shanghai Ind Technol Res Inst, Shanghai 201800, Peoples R China

[4] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[5] Shanghai MExpert Technol Co Ltd, Shanghai 201899, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2024年 / 376卷

关键词：

Piezoelectric micromirror array; Quasi-static micromirror; High fill factor; Three degree of freedom; TILT-PISTON MICROMIRROR;

D O I：

10.1016/j.sna.2024.115597

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents the design of a novel 3x3 piezoelectric micromirror array (PMMA) with an 84.6 % fill factor and describes a three-dimensional hidden fabrication platform. The fabricated device operates with quasi-static mode in 3-degree-of-freedom, namely tip, tilt, and piston. In order to achieve a high fill factor, a threedimensional hidden micromirror array structure is introduced, and is realized through multi-layer bonding. In addition, a double-stop-layer's glass cover for optical device was employed to realize transparent wafer-level packaging. The device testing result achieves a mechanical tilting angle of 4.4 mrad at 82.5 VDC with over 99.5 % linearity. This design has the potential to achieve a larger size of micromirror arrays.

引用

页数：10

共 50 条

[1] AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor
Zhang, Junning
Wang, Yan
Chen, Peng
Lv, Tunan
Yu, Hongbin
SENSORS AND ACTUATORS A-PHYSICAL, 2024, 379
[2] Modeling and experimental validation of hysteretic scan behavior of quasi-static piezoelectric micromirror
Merli, M.
Mendicino, G.
Carminati, R.
Boni, N.
MOEMS AND MINIATURIZED SYSTEMS XXI, 2022, 12013
[3] High Fill Factor MEMS Mirror Array
Buswell, Steven
Lam, Lawrence
Zhou, Tiansheng
2012 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN), 2012, : 101 - 102
[4] Quasi-static approximation for 6 degrees-of-freedom haptic rendering
Wan, M
McNeely, WA
IEEE VISUALIZATION 2003, PROCEEDINGS, 2003, : 257 - 262
[5] A translation micromirror with large quasi-static displacement and high surface quality
Xue, Yuan
He, Siyuan
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (01)
[6] High fill-factor micromirror array and its fabrication process
Jeon, JW
Kim, DH
Yoon, JB
Lim, KS
IEEE/LEOS OPTICAL MEMS 2005: INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND THEIR APPLICATIONS, 2005, : 53 - 54
[7] Quasi-static contact problem with finitely many degrees of freedom and dry friction
Schmid, Florian
ZAMM-ZEITSCHRIFT FUR ANGEWANDTE MATHEMATIK UND MECHANIK, 2009, 89 (05): : 383 - 398
[8] High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping
Weber, Stefan M.
Noell, Wilfried
Lani, Sebastien
Jutzi, Fabio
Bruehlmeier, Peter
Kiselev, Denis
Extermann, Jerome
Bonacina, Luigi
Wolf, Jean-Pierre
de Rooij, Nico F.
MOEMS AND MINIATURIZED SYSTEMS IX, 2010, 7594
[9] Extreme angle, tip-tilt MEMS micromirror enabling full hemispheric, quasi-static optical coverage
Pollock, C.
Javor, J.
Stange, A.
Barrett, L. K.
Bishop, D. J.
OPTICS EXPRESS, 2019, 27 (11): : 15318 - 15326
[10] A Dual-Axis High Fill-Factor Micromirror Array for High Thermal Loads
Ataman, C.
Lani, S.
Noell, W.
Jutzi, F.
Bayat, D.
de Rooij, N.
OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, 2011, : 135 - 136

← 1 2 3 4 5 →