Key technology in the device of thin film width measurement based on linear CCD

被引：0
|
作者：
Zhang, Hong-Tao [1 ]
Duan, Fa-Jie [1 ]
Hu, Liang [1 ]
Ye, Sheng-Hua [1 ]
机构：
[1] State Key Lab. of Precision Measuring Technology and Instruments, Tianjin University, Tianjin 300072, China
来源：
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology | 2009年 / 41卷 / 05期
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摘要：
8
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页码：110 / 112
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