Development of temperature-compensated catheter flow sensor for measuring reciprocating air flows in bronchial pathways

被引：0

作者：

Matsuyama, Takuya ^{[1
]}

Yamazaki, Yudai ^{[1
]}

Matsushima, Miyoko ^{[2
]}

Kawabe, Tsutomu ^{[2
]}

Shikida, Mitsuhiro ^{[1
]}

机构：

[1] Department of Micro-Nano Systems Engineering, Graduate School of Engineering, Nagoya University Furo-cho, Nagoya, Aichi 464-8603, Japan

[2] Department of Radiological and Medical Laboratory Sciences, Graduate School of Medicine, Nagoya University 1-1-20, Nagoya, Aichi 461-8673, Japan

来源：

IEEJ Transactions on Sensors and Micromachines | 2014年 / 134卷 / 06期

关键词：

Plasma etching - Temperature distribution;

D O I：

10.1541/ieejsmas.134.126

中图分类号：

学科分类号：

摘要：

We introduced groove structures in between the flow- and temperature-sensors to avoid the heat flow to the temperature sensor from the heater used as the flow sensing. The grooves were produced by oxygen plasma etching, and thermal isolation effect by those was confirmed by an infrared thermography. The relationships between the flow rate and the flow sensor output with and without temperature compensation were evaluated. We finally confirmed that the variations of the flow sensor output by the change of the fluid temperature were successfully compensated by the temperature sensor. © 2014 The Institute of Electrical Engineers of Japan.

引用

页码：126 / 131

共 12 条

[1] Characteristics of an optimized catheter-type thermal flow sensor for measuring reciprocating airflows in bronchial pathways
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