Environment Compensation Technologies in Dual-Frequency Laser Interferometer Measurement System

被引：0
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作者：
Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China [1 ]
不详 [2 ]
机构：
来源：
Zhongguo Jiguang | / 4卷
关键词：
Compensation technology - Dual frequency laser interferometer - Dual-frequency interferometer - Empirical formulas - Environmental compensation - Measurement precision - Nanometer measurement - Precision measurement;
D O I：
10.3788/CJL201441.0408004
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学科分类号：
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