Asymmetric errors identification in the drive-mode structure for a dual-mass MEMS gyroscope

被引：0
|
作者：
Liu, Yanfeng [1 ]
Chen, Zhiyong [1 ]
Zhang, Rong [1 ]
Zhang, Ruixue [2 ]
机构：
[1] Engineering Research Center for Navigation Technology, Department of Precision Instrument, Tsinghua University, Beijing,100084, China
[2] Navigation and Control Technology Research Institute, Norinco Group, Beijing,100089, China
来源：
Qinghua Daxue Xuebao/Journal of Tsinghua University | 2015年 / 55卷 / 03期
关键词：
Asymmetric errors - Asymmetric parameters - Asymmetric vibrations - Dual-mass gyroscopes - Frequency sweep measurement - Micro electromechanical system (MEMS) - Stiffness coefficients - Vibration characteristics;
D O I：
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学科分类号：
摘要：
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页码：327 / 332
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