Structure and Mechanical Properties of Multi-Element (CrMoTaNbVTi)N Films by Reactive Magnetron Sputtering

被引：0
|
作者：
Feng, Xingguo [1 ]
Zheng, Yugang [1 ]
Zhang, Kaifeng [1 ]
Zhou, Hui [1 ]
Hu, Hanjun [1 ]
机构：
[1] Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou,730000, China
来源：
Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering | 2020年 / 49卷 / 08期
基金：
中国国家自然科学基金;
关键词：
BCC solid solution - Columnar crystals - Direct current magnetron sputtering - Hardness and elastic modulus - Reactive magnetron sputtering - Solid solution structures - Surface particles - Wear behaviors;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
26
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收藏
页码：2623 / 2629
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