Atomic understanding of the densification removal mechanism during chemical mechanical polishing of fused glass

被引：0
|
作者：
Liu, Wei [1 ]
Yuan, Song [1 ]
Guo, Xiaoguang [1 ]
机构：
[1] Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education, Dalian University of Technology, Dalian,116024, China
来源：
Applied Surface Science | 2022年 / 591卷
关键词：
Compendex;
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学科分类号：
摘要：
Molecular dynamics
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