Differential confocal profile tracking measurement method based on Kalman prediction

被引：0
|
作者：
Luo J. [1 ,2 ]
Liu Z. [1 ,2 ]
Liu Y. [1 ,2 ]
Zhao W. [1 ,2 ]
Wang Y. [1 ,2 ]
机构：
[1] School of Optics and Photonics, Beijing Institute of Technology, Beijing
[2] MIIT Key Laboratory of Complex-filed Intelligent Exploration, Beijing Institute of Technology, Beijing
来源：
Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument | 2023年 / 44卷 / 03期
关键词：
differential confocal; Kalman prediction; laser fusion capsule; surface profile measurement;
D O I：
10.19650/j.cnki.cjsi.J2210696
中图分类号：
学科分类号：
摘要：
It is difficult to realize high efficiency of axial scanning differential confocal measurement (ASDCM). In this article, a differential confocal profile tracking measurement method based on Kalman prediction is proposed. In this method, the linear range of hundreds of nanometers of laser differential confocal axial response curve is used for high-precision linear sensing measurement of the continuous surface profile, which improves the measurement efficiency. Meanwhile, the Kalman predictor profile tracking method is introduced to predict and track the unmeasured surface using the measured profile point data, which expands the range of linear sensing profile measurement. Compared with the ASDCM, experimental results show that the measurement efficiency of this method is improved by 8 times, the high-precision tracking measurement of the standard elliptical column with the PV value of the outer profile is greater than the linear sensing measurement range, and the repeated measurement standard deviation of the roundness of the laser inertial confinement fusion capsule is 3 nm. It provides a high quality method for high precision, fast and nondestructive measurement of continuous surface profile of rotary precision components. © 2023 Science Press. All rights reserved.
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页码：25 / 32
页数：7
相关论文
共 18 条
  • [1] HURRICANE O A, CALLAHAN D A, CASEY D T, Et al., Fuel gain exceeding unity in an inertially confined fusion implosion [ J ], Nature, 506, 7488, pp. 343-348, (2014)
  • [2] BETTI R, HURRICANE O A., Inertial-confinement fusion with lasers [ J ], Nature Physics, 12, 5, pp. 435-448, (2016)
  • [3] TAN Y, ZHU J., Spatial three-mirror off-axis freeform optical system without any symmetry [ J], Photonics, 9, 5, (2022)
  • [4] CHEN S, XUE S, ZHAI D, Et al., Measurement of freeform optical surfaces: Trade-off between accuracy and dynamic range[J], Laser & Photonics Reviews, 14, 5, (2020)
  • [5] ZHANG Y, ZENG A, HUANG H, Et al., Large-area three-dimensional profilometer based on digital micromirror device [ J ], Journal of Optical Technology, 82, 2, pp. 102-107, (2015)
  • [6] ZHAO W, TAN J, QIU L., Bipolar absolute differential confocal approach to higher spatial resolution[J], Optics Express, 12, 21, pp. 5013-5021, (2004)
  • [7] MA X, QIU L, WANG Y, Et al., High-precision laser differential confocal measurement method for multigeometric parameters of inner and outer spherical surfaces of laser fusion capsules [ J], Optics Express, 28, 7, pp. 9913-9928, (2020)
  • [8] WANG L, QIU L, ZHAO W, Et al., Laser differential confocal inner-surface profile measurement method for an ICF capsule[J], Optics Express, 25, 23, pp. 28510-28523, (2017)
  • [9] HUANG J W, MA X X, LIU Z H, Et al., Optimized sphericity measurement method for the latitude and longitude traces on the surface of ICF capsule, Chinese Journal of Scientific Instrument, 43, 1, pp. 127-135, (2022)
  • [10] WANG J, CUI Y, LIANG D, Et al., Differential confocal measurement for surface topography with microstructures based on spiral scanning and wavelet filter[J], Applied Optics, 59, 36, pp. 11359-11370, (2020)
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