FABRICATION OF MoNx THIN FILMS AND ITS APPLICATIONS IN FLEXIBLE STAINLESS STEEL CIGS SOLAR CELLS

被引：0
|
作者：
Han S. [1 ]
Chang X. [1 ]
Chen J. [1 ]
Li X. [1 ]
Xu Y. [1 ]
机构：
[1] College of Physical Science and Technology, Hebei University, Baoding
来源：
Taiyangneng Xuebao/Acta Energiae Solaris Sinica | 2023年 / 44卷 / 07期
关键词：
barrier layer; CIGS; MoNx thin films; solar cells;
D O I：
10.19912/j.0254-0096.tynxb.2022-0403
中图分类号：
学科分类号：
摘要：
MoNx thin films are prepared by reactive magnetron sputtering. The effects of N2 flow on the structure，morphology，elemental composition and photoelectric properties of MoNx thin films are investigated. The results show that with the flow rate of N2 increased，the crystal phase of the films gradually changes from Mo phase to Mo2N phase. The reflectivity of the films also increases with the increases of N2 flow. XPS analysis showed that the oxidation states ratio of Moδ + is increases with the increases of N2 flow. MoNx is deposited on stainless steel as a diffusion barrier layer for CIGS solar cells. SIMS measurement revealed that Fe diffusion is suppressed with the MoNx barrier layer. Finally，the efficiency of the flexible CIGS solar cell is increased from 10% to 12.5%. © 2023 Science Press. All rights reserved.
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页码：122 / 128
页数：6
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