Fabrication of Ordered Micro/Nanostructures Using Probe-Based Force-Controlled Micromachining System

被引：0
|
作者：
Geng, Yanquan [1 ,2 ]
Wang, Yuzhang [1 ,2 ]
Cai, Jianxiong [2 ]
Zhang, Jingran [3 ]
Yan, Yongda D. [1 ,2 ]
机构：
[1] Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin Institute of Technology, Heilongjiang, Harbin,150001, China
[2] Center for Precision Engineering, Harbin Institute of Technology, Heilongjiang, Harbin,150001, China
[3] College of Mechanical and Electric Engineering, Changchun University of Science and Technology, Jilin, Changchun,130000, China
来源：
Research Square | 2020年
关键词：
Finite elements simulation - Force-controled - Indentation arrays - Indenters - Micronanostructure - Nano-indentation methods - Ordered micro/nanostructure - Probe-based - Rotation angles - Simulation approach;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
21
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