共 28 条
- [1] Zhang X, Tan Y., A hybrid model for rate-dependent hysteresis in piezoelectric actuators[J], Sensors & Actuators A Physical, 157, pp. 54-60, (2010)
- [2] Wang G, Chen G, Bai F., High-speed and precision control of a piezoelectric positioner with hysteresis, resonance and disturbance compensation[J], Microsystem Technologies, 22, 10, pp. 1-11, (2015)
- [3] YUAN Gang, LI Shi-dong, WANG Dai-hua, A stiffness measurement method for piezoelectric ceramic stack actuator[J], Chinese Journal of Scientific Instrument, 36, pp. 568-573, (2015)
- [4] Polit S, Dong J., Development of a high-bandwidth xy nanopositioning stage for high-rate micro-nanomanufacturing, IEEE/ASME Transactions on Mechatronics, 16, pp. 724-733, (2011)
- [5] Armin M, Roy P N, Das S K., A survey on modelling and compensation for hysteresis in high speed nanopositioning of AFMs: observation and future recommendation[J], International Journal of Automation, 17, pp. 479-501, (2020)
- [6] Davoodi A A, Izadi I, Ghaisary J., Design and implementation of a feedforward feedback controller for a piezoelectric actuator, 2019 27th Iranian Conference on Electrical Engineering (ICEE), (2019)
- [7] MA Xiao-lu, QIU Jin-hai, JI Hong-li, Et al., Active-passive piezoelectric vibration control method based on a voltage-controlled charge source and a wavelet transformation adaptive algorithm [J], Journal of Vibration and Shock, 31, 11, pp. 22-25, (2012)
- [8] Yu S, Xie M, Wu H, Et al., Composite proportional-integral sliding mode control with feedforward control for cell puncture mechanism with piezoelectric actuation, ISA Transactions, (2020)
- [9] FAN Wei, LIN Yu-yang, LI Zhong-Shen, Hysteresis characteristics of piezoelectric ceramic actuators [J], Optical and Precision Engineering, 24, pp. 1112-1117, (2016)
- [10] HU Jia-ming, ZHU Xiao-jin, FANG Yu-bin, Et al., Compensation control for piezoelectric stack based on a hysteretic observer[J], Journal of Vibration and Shock, 40, pp. 81-86, (2021)