Mechanical milling and polishing of cross sections using a micro CNC machine for failure analysis

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作者：
Pichumani, Pradip Sairam [1 ]
Khatkhatay, Fauzia [1 ]
机构：
[1] GlobalFoundries Inc., Malta,NY, United States
来源：
Electronic Device Failure Analysis | 2020年 / 22卷 / 01期
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页码：14 / 19
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