Design, Modeling, and Testing of a Long-Stroke Fast Tool Servo Based on Corrugated Flexure Units

To further enhance the performance of the fast tool servo (FTS) system in terms of stroke, load capacity, and application area, this paper proposes a novel fast tool servo device driven by a voice coil motor (VCM), based on a three-segment uniform corrugated flexure (CF) guiding mechanism, with a large stroke, high accuracy, and high dynamics. To describe the unified static characteristics of such device, the compliance matrix method is applied to establish its model, where the influence of CF beam structural parameters on the FTS device is investigated in detail. Furthermore, resolution and positioning accuracy tests are conducted to validate the features of the system. The testing results indicate that the maximum stroke of the FTS device is up to 3.5 mm and the positioning resolution values are 3.6 mu m and 2.4 mu m for positive and negative stroke, respectively, which further verifies the device's effectiveness and promising application prospect in ultra-precision microstructure machining.