Design of a Novel Three-Degree-of-Freedom Piezoelectric-Driven Micro-Positioning Platform with Compact Structure

In this paper, a novel three-degree-of-freedom piezoelectric-driven micro-positioning platform based on a lever combination compound bridge-type displacement amplification mechanism is proposed. The micro-positioning platform proposed in this paper aims to solve the current problem of the large size and small travel of the three-degree-of-freedom piezoelectric-driven micro-positioning platform. In this paper, a lever combination compound bridge-type displacement amplification mechanism combined with a new biaxial flexible hinge is proposed, the structural dimensions of the lever mechanism and the compound bridge mechanism are optimized, and the amplification multiplier is determined. The maximum output simulation analysis of the micro-positioning platform is carried out by using ANSYS, and the experimental test system is built for verification. The validation results show that the maximum errors between simulation and experiment in the z-direction, rotation direction around x, and rotation direction around y are 64 mu m, 0.016 degrees, and 0.038 degrees, respectively, and the corresponding maximum relative errors are 5.6%, 2.4%, and 6.6%, respectively, which proves the feasibility of the theoretical design.