共 50 条
- [2] Robust real-time thin film thickness estimation 2006 IEEE/SEMI ADVANCED SEMICONDUCTOR MANUFACTURING CONFERENCE AND WORKSHOP, 2006, : 57 - +
- [4] Terahertz Thin-Film Thickness Real-Time Sensing Based on Ring Hole Array Metamaterials 2024 49TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, IRMMW-THZ 2024, 2024,
- [5] SPECTROSCOPIC ELLIPSOMETRY ON THE MILLISECOND TIME SCALE FOR REAL-TIME INVESTIGATIONS OF THIN-FILM AND SURFACE PHENOMENA REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (08): : 3842 - 3848
- [7] REAL-TIME OPTICAL THICKNESS MONITOR FOR THIN FILM GROWTH 2009 34TH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE, VOLS 1-3, 2009, : 115 - 117
- [8] Real-time ellipsometry studies of gold thin-film growth JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (6A): : 3662 - 3668
- [9] REAL-TIME MONITOR FOR THIN-FILM ETCHING IN ATOMIC OXYGEN ENVIRONMENTS SURFACE & COATINGS TECHNOLOGY, 1992, 52 (01): : 51 - 56
- [10] REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS IN POLYMER AND THIN-FILM GROWTH ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1991, 202 : 252 - POLY