Effect of CO addition on the microstructure and properties of TiN coatings grown by chemical vapor deposition

被引:0
|
作者
Liu, Bolu [1 ]
Zhong, Shuqi [1 ]
Zhuang, Limin [2 ]
Lin, Liangliang [2 ]
Zheng, Aiqin [2 ]
Liu, Chao [1 ]
机构
[1] Xiamen Tungsten Co Ltd, Xiamen 361009, Peoples R China
[2] Xiamen Golden Egret Special Alloy Co Ltd, Xiamen 361006, Peoples R China
关键词
Carbon monoxide; Titanium oxycarbonitride; Chemical vapor deposition; Microstructure; Mechanical properties; Metal cutting property; MECHANICAL-PROPERTIES; TEMPERATURE; PERFORMANCE; TI(C; N);
D O I
10.1016/j.tsf.2024.140469
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
TiN coatings with 0-8 vol.% CO addition were prepared by chemical vapor deposition at 1000 degrees C. Pure TiOCN phase was formed with different CO additions, and no apparent local elemental segregation was found. With increasing CO content up to 6 vol.%, the dissolution of O and C increased, accompanied by a decrease in N content and a reduction in grain size. Further increasing the CO content to 8 vol.% did not result in any apparent changes in the amount of O/C dissolution and coating grain size. The intensity of [111] orientation was the highest with 2 vol.% CO addition. The adhesion strength decreased as the CO addition increased, while the hardness first significantly increased with 2 vol.% CO addition, and then remained nearly constant with further increasing CO addition up to 8 vol.%. As the CO content increased to 8 vol.%, the insert continuous cutting life of machining QT500 spheroidal graphite cast iron exhibited a trend similar to that of the hardness.
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页数:8
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