Large-stroke and high-precision coaxial integrated macro-micro composite actuator based on VCM and GMA

A coaxially integrated macro-micro composite actuator (MMCA) with large stroke and high accuracy is proposed by combining a voice coil motor (VCM) with the giant magnetostrictive actuator (GMA). The magnetic circuit model of the macro- motion part is established based on the driving principle of VCM, and the multi-field coupling model of the micro-motion part is established based on the Jiles-Atherton model. The finite element method was used to analyze the relationship between displacement, output force, velocity, acceleration, and time of the macro-motion part under different currents, the magnetic flux density, output force, and displacement curves of the micro-motion part, and the mutual influence between the macro and micro motion parts were analyzed. The prototype of the MMCA was developed, and an experimental test platform was built. The results show that the MMCA macro-motion displacement curve can fit the simulation curve well during open-loop positioning, and when the current size of the input macro-motion coil is 4 A, the experimental curve of the MMCA is the most consistent with the simulation curve. When closed-loop control, the motion curve of the drive can well follow the set displacement curve, in which the maximum stroke of the prototype developed is 50 mm, the positioning error of the macro-motion part is less than 20 mu m, the maximum stroke of the micro-motion part is 40 mu m, and the overall positioning accuracy of the MMCA is 0.14 mu m. The research results provide a new idea and theoretical basis for further optimization and development of precision positioning platform with high precision and large stroke.