共 50 条
- [2] High-power pulsed sputtering using a magnetron with enhanced plasma confinement JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2007, 25 (01): : 42 - 47
- [9] Novel type of power supply for high-power pulsed magnetron sputtering Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology, 2013, 33 (02): : 168 - 170