A symmetric heterogate dopingless electron-hole bilayer TFET with ferroelectric and barrier layers

被引:0
|
作者
Liu, Hu [1 ]
Zhou, Xiaoyu [1 ]
Li, Peifeng [1 ]
Wang, Pengyu [1 ]
Li, Yubin [1 ]
Pan, Lei [1 ]
Zhang, Wenting [1 ]
机构
[1] Lanzhou Jiaotong Univ, Sch Elect & Informat Engn, Lanzhou 730070, Peoples R China
基金
中国国家自然科学基金;
关键词
tunnel field-effect transistor; electron-hole bilayer; symmetric heterogate; dielectric barrier layer; ferroelectric layer; FIELD-EFFECT TRANSISTOR; NANOWIRE-TFET; TUNNEL FET; DESIGN;
D O I
10.1088/1402-4896/ad5b8e
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
In this paper, a symmetric heterogate dopingless electron-hole bilayer tunnel field-effect transistor with a ferroelectric layer and a dielectric barrier layer (FBHD-EHBTFET) is proposed. FBHD-EHBTFET can not only avoid random doping fluctuation and high thermal budget caused by doping, but also solve the issue that conventional EHBTFETs are unable to use the self-alignment process during device manufacturing. The simultaneous introduction of the symmetric heterogate and dielectric barrier layer can significantly suppress off-state current (I off). Ferroelectric material embedded in the gate dielectric layer can enhance electron tunneling, contributing to improving on-state current (I on) and steepening average subthreshold swing (SS avg). By optimizing various parameters related to the gate, ferroelectric layer, and dielectric barrier layer, FBHD-EHBTFET can obtain the I off of 1.11 x 10-18 A mu m-1, SS avg of 12.5 mV/dec, and I on of 2.59 x 10-5 A mu m-1. Compared with other symmetric dopingless EHBTFETs, FBHD-EHBTFET can maintain high I on while reducing its I off by up to thirteen orders of magnitude and SS avg by at least 51.2%. Moreover, investigation demonstrates that both interface fixed charge and interface trap can increase I off, degrading the off-state performance of device. The study on FBHD-EHBTFET-based dynamic random access memory shows that it has the high read-to-current ratio of 1.1 x 106, high sense margin of 0.42 mu A mu m-1, and long retention time greater than 100 ms, demonstrating that it has great potential in low-power applications.
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页数:18
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