An Ultra-low Thermal Sensitivity Drift Piezoresistive Pressure Sensor Compensated by Passive Resistor/Thermistor Network

被引：1
|
作者：
Meng, Qinggang [1 ,2 ]
Wang, Junbo [1 ,2 ]
Chen, Deyong [1 ,2 ]
Chen, Jian [1 ,2 ]
Xie, Bo [1 ]
Lu, Yulan [1 ]
机构：
[1] Chinese Acad Sci, Aerosp Informat Res Inst, State Key Lab Transducer Technol, Beijing 100190, Peoples R China
[2] Univ Chinese Acad Sci, Sch Elect Elect & Commun Engn, Beijing 100049, Peoples R China
来源：
25TH ANNUAL CONFERENCE & 14TH INTERNATIONAL CONFERENCE OF THE CHINESE SOCIETY OF MICRO-NANO TECHNOLOGY, CSMNT 2023 | 2024年 / 2740卷
基金：
中国国家自然科学基金; 国家重点研发计划;
关键词：
D O I：
10.1088/1742-6596/2740/1/012042
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a piezoresistive pressure sensor that exhibits extremely low thermal sensitivity drift across a broad range of temperatures, which integrates a passive resistor/thermistor network for compensation. Standard microfabrication processes were conducted to fabricate the sensor chip. From the experimental results, the proposed sensor demonstrated an extremely low thermal sensitivity drift of 0.01% FS/degrees C within temperature range of -55 degrees C to 85 degrees C, which is a significant improvement compared with the sensor with no temperature compensation (0.17% FS/degrees C) and the sensor with conventional temperature compensation (0.09% FS/degrees C). The compensation method developed in this study has the potential to serve as a facilitating instrument in pressure measurements with large temperature variations.
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页数：6
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