Semi-Metal Edge Contact for Barrier-Free Carrier Transport in MoS2 Field Effect Transistors

被引:2
|
作者
Lee, Sungwon [1 ]
Wang, Xinbiao [1 ]
Shin, Hoseong [1 ]
Ali, Nasir [1 ]
Ngo, Tien Dat [1 ]
Hwang, Euyheon [1 ]
Kim, Gil-Ho [1 ,2 ]
Yeom, Geun Young [1 ,3 ]
Watanabe, Kenji [4 ]
Taniguchi, Takashi [4 ]
Yoo, Won Jong [1 ]
机构
[1] Sungkyunkwan Univ, SKKU Adv Inst Nano Technol, Suwon 16419, Gyeonggi Do, South Korea
[2] Sungkyunkwan Univ, Sch Elect & Elect Engn, Suwon 16419, Gyeonggi Do, South Korea
[3] Sungkyunkwan Univ, Sch Adv Mat Sci & Engn, Suwon 16419, Gyeonggi Do, South Korea
[4] Natl Inst Mat Sci, Tsukuba 3050044, Japan
基金
新加坡国家研究基金会;
关键词
2D molybdenum disulfide; plasma etching; edgecontact; ohmic behavior; contact resistance; transmission line measurement; METAL; TRANSITION; MOBILITY; LIMITS;
D O I
10.1021/acsaelm.4c00250
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The high contact resistance (R-c) arising at the interface between a metal and a two-dimensional (2D) material presents a significant challenge to carrier transport in semiconductor devices based on 2D materials. The van der Waals gap and metal-induced gap states formed at the 2D interface give rise to an uncontrollable Schottky barrier, resulting in a high R-c. In this study, we report the achievement of very low R-c and ohmic behavior of molybdenum disulfide (MoS2) field-effect transistors through the implementation of the edge contacts using semimetallic antimony (Sb). Our findings reveal that the edge contacts formed with Sb facilitate barrier-free carrier injection at the interface of MoS2 devices, leading to highly efficient charge transport at room temperature, resulting in an unexpectedly further lowered R-c (600 Omega<middle dot>mu m) at 10 K with a negligible Schottky barrier height. Further support for barrier-free ohmic transport is provided by density functional theory simulations, confirming that semimetallic Sb exhibits a very low density of states (DOS), with the Fermi level aligning well with the DOS of MoS2. Additionally, a comparison of linearity in output I-V characteristics with other metals confirms the superiority of the Sb edge contacts.
引用
收藏
页码:4149 / 4158
页数:10
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