Review of electron emission and electrical breakdown in nanogaps

被引:11
|
作者
Li, Yimeng [1 ]
Ang, Lay Kee [2 ]
Xiao, Bing [1 ]
Djurabekova, Flyura [3 ,4 ]
Cheng, Yonghong [1 ]
Meng, Guodong [1 ]
机构
[1] Xi An Jiao Tong Univ, State Key Lab Elect Insulat & Power Equipment, Xian 710049, Peoples R China
[2] Singapore Univ Technol & Design, Sci Math & Technol, Singapore City 487372, Singapore
[3] Univ Helsinki, Helsinki Inst Phys, POB 43, FI-00014 Helsinki, Finland
[4] Univ Helsinki, Dept Phys, POB 43, FI-00014 Helsinki, Finland
基金
中国国家自然科学基金;
关键词
CHARGE-LIMITED CURRENT; FIELD-EMISSION; SPACE-CHARGE; METALLIC ELECTRODES; MICROMETER SEPARATIONS; VACUUM BREAKDOWN; LOW-VOLTAGE; FABRICATION; MECHANISM; SURFACE;
D O I
10.1063/5.0202607
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
With the continual miniaturization of electronic devices, there is an urgent need to understand the electron emission and the mechanism of electrical breakdown at nanoscale. For a nanogap, the complete process of the electrical breakdown includes the nano-protrusion growth, electron emission and thermal runaway of the nano-protrusion, and plasma formation. This review summarizes recent theories, experiments, and advanced atomistic simulation related to this breakdown process. First, the electron emission mechanisms in nanogaps and their transitions between different mechanisms are emphatically discussed, such as the effects of image potential (of different electrode's configurations), anode screening, electron space-charge potential, and electron exchange-correlation potential. The corresponding experimental results on electron emission and electrical breakdown are discussed for fixed nanogaps on substrate and adjustable nanogaps, including space-charge effects, electrode deformation, and electrical breakdown characteristics. Advanced atomistic simulations about the nano-protrusion growth and the nanoelectrode or nano-protrusion thermal runaway under high electric field are discussed. Finally, we conclude and outline the key challenges for and perspectives on future theoretical, experimental, and atomistic simulation studies of nanoscale electrical breakdown processes.
引用
收藏
页数:19
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