Two-dimensional Small Displacement Measurement Method Based on Capacitive Grating Sensor

被引：0
|
作者：
Wang R. [1 ]
Li X. [1 ]
Ma T. [1 ]
Du H. [1 ]
Lu Y. [1 ]
机构：
[1] Key Laboratory of Instrumentation Scienceand Dynamic Measurement of Ministry of Education, North University of China, Taiyuan, 030051, Shanxi
来源：
Binggong Xuebao/Acta Armamentarii | 2020年 / 41卷 / 07期
关键词：
Capacitance grating sensor; Edge effect; Plane small displacement; Two-dimensional measurement;
D O I：
10.3969/j.issn.1000-1093.2020.07.023
中图分类号：
学科分类号：
摘要：
A two-dimensional small-displacement measurement method based on capacitive grating sensor and a binary parameter model of displacement in any direction on a plane are proposed, and a dual-channel test system with capacitive grating sensor for small displacement is designed for the difficult discrimination of direction of small displacement of object.The small displacement (mm) of simulated object on the plane is measured on a simulation test bench with 2 micrometers. The two channels of the test system output the differential voltages corresponding to the change in small displacement. The magnitude and direction of small displacement can be obtained by analyzing the differential voltage outputs of two channels. The feasibility of the test method and the correctness of the parameter model were verified through experiment. The experimental results show that the direction and magnitude of displacement can be clearly determined according to the change in the differential voltage outputs of two channels when an object produces a relative displacement in one direction on x-axis or y-axis of the plane coordinate; and the direction and magnitude of displacement can be determined from the computed results of the parameter model by the analyzing the change in the differential voltage outputs of two channels when an object produces a relative displacement at any location on the plane. © 2020, Editorial Board of Acta Armamentarii. All right reserved.
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页码：1441 / 1448
页数：7
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