Surface Potential Measurement of Dielectric Materials Using Metal Probe in Secondary Electron Emission Process

被引：2
|
作者：
Yin M. [1 ]
Weng M. [1 ]
Liu W. [1 ]
Wang F. [1 ]
Cao M. [1 ]
机构：
[1] Key Laboratory of Physical Electronics and Devices of Education Ministry, Xi'an Jiaotong University, Xi'an
来源：
Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University | 2019年 / 53卷 / 01期
关键词：
Dielectric material; Secondary electron emission; Simulation; Surface potential measurement;
D O I：
10.7652/xjtuxb201901022
中图分类号：
学科分类号：
摘要：
To study measurement methods and relevant rules of the surface potential in the process of secondary electron emission of dielectric materials, this paper proposes a new in situ online method for the measurement of the surface potential of insulating samples based on the fact that electric field will affect the secondary electron emission, and we call it probe method. Firstly, the principle of the probe method is studied by using a professional electromagnetic simulation software. The potential distribution near the probe and the influence of probe bias on the secondary electron emission coefficient are calculated. Then the probe bias at the knee of the curve is considered as the surface potential of the dielectric sample. Secondly, experiments are carried out with copper samples, and the feasibility of the probe method for measuring the surface potential of the samples is verified. Finally, the probe method is applied to the dielectric material polymethyl methacrylate (PMMA) to measure its surface potential. The results show that the grid bias voltage and the incident electron energy have direct influences on the surface potential of PMMA. The surface potential of PMMA is higher than the grid bias and they are in a linear relationship. With the increase of the incident electron energy, the surface potential of PMMA increases first and then decreases. This is consistent with the theoretical analysis, which further validates the feasibility of the probe method in measuring the surface potential of dielectric materials. This method is easy to operate and low in cost, and can realize in situ online measurement to reduce the instability in the experiment, therefore it is applicable to the study of the secondary electron emission of dielectric materials. © 2019, Editorial Office of Journal of Xi'an Jiaotong University. All right reserved.
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页码：163 / 168
页数：5
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