[1] Univ Sci & Technol China, Dept Precis Machinery & Precis Instrumentat, CAS Key Lab Mech Behav & Design Mat, Hefei 230026, Peoples R China
[2] Univ Sci & Technol China, Key Lab Precis Sci Instrumentat, Anhui Higher Educ Inst, Dept Precis Machinery & Precis Instrumentat, Hefei 230026, Peoples R China
[3] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Peoples R China