THIN-FILM FILTER PERFORMANCE FOR EXTREME ULTRAVIOLET AND X-RAY APPLICATIONS

被引：66
|
作者：
POWELL, FR
VEDDER, PW
LINDBLOM, JF
POWELL, SF
机构：
[1] UNIV CALIF BERKELEY,SPACE SCI LAB,BERKELEY,CA 94720
[2] STANFORD UNIV,CTR SPACE SCI & ASTROPHYS,ELECTR RES LAB,STANFORD,CA 94305
[3] STANFORD UNIV,DEPT MAT SCI & ENGN,STANFORD,CA 94305
[4] RAYCHEM CORP,MENLO PK,CA 94025
来源：
OPTICAL ENGINEERING | 1990年 / 29卷 / 06期
关键词：
D O I：
10.1117/12.55641
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：614 / 624
页数：11
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