APPLICATIONS OF SECONDARY ION MASS-SPECTROMETRY (SIMS) FOR THE ANALYSIS OF ELECTRONIC MATERIALS

Over the past decade, secondary ion mass spectrometry (SIMS) has developed into a powerful technique for studying the surface chemistry of solids. The technique has been successfully employed in studying a wide range of materials, including those of particular interest in the electronics industry. The versatility of the SIMS technique in its three major modes (static, dynamic and scanning) is demonstrated in examples of the surface characterisation of semiconductor materials.